Study on Aerodynamic Sliding Table Using Squeeze-Gas Film Effect

Abstract

This paper describes the float characteristics of an aerodynamic sliding table which can realize non-contact linear motion guide systems using squeeze-gas film effect. This sliding table uses piezoelectric actuators and elastic hinges in order to vibrate the slider surface and generate squeeze-gas film pressure. In the theoretical analysis, a simple dynamic model of the proposed sliding table is presented. The influences of displacement and vibration frequency of piezoelectric actuators on the float characteristics are investigated theoretically and experimentally. In addition, load capacity at vibration frequency of 2200 Hz is experimentally measured. It was consequently found that the proposed sliding table can realize a non-contact linear motion guide and the dynamic model presented in this paper can predict well the float characteristics of the proposed sliding table.