Estimation of bending stress of microcantilever : Investigation of measuring principle using macro-model

Abstract

A measurement system constructed with a micro fizeau interferometer and the spatial fringe analysis method is proposed to measure precisely a deflection of micro structures. The results of the deflection are given as the boundary condition of the FEM. A stress in the element is analyzed by the FEM. To confirm the validity of the principle, the experiment is performed with a macro model. The measuring optical system for the macro model is constructed with a projection moire system. Without any contacts, the stress map in the element can be estimated by this method. Comparing the results from this method and strain gauges, it confirms that the accuracy of the estimation of the stress is less than 5 MPa in the macro model. On basis of results in the macro model, a stress in a micro cantilever can be estimated.