2009 Volume 75 Issue 759 Pages 3076-3081
Nickel electroforming is used as a fabrication technology of micro metal mold including LIGA process. However, neither the strength nor peelability of electroformed nickel is enough. There are several methods that is alloying or using additive composition of electroplating bath to improve strength of the nickel mold. In this research, we improved the hardness of the nickel mold by electroforming. We used sodium allylsulfonate as an additive for hard nickel electroplating. The hardness was approximately 600Hv and kept the property after annealing of temperature 250℃. The abrasion resistance was approximately 41 WR after annealing of temperature 250℃. Finally, we fabricated double layer nickel mold has micro pattern and the thickness of 4mm.