Development of Multi-Degrees-of-Freedom Microscope Stage Constructed of Electromagnetic Actuator Using Rubber(Mechanical Systems)

Abstract

In this study, fundamental properties of a hybrid rubber-electromagnetic actuator (RE actuator) are presented. RE actuator including the permanent magnet is introduced. By using the permanent magnet, the heat generation can be reduced because there is no necessity of the bias current. Pushpull operation can be realized by changing the polarity of the electromagnet. And both ends driven type RE actuator, which has driven parts at both ends of the actuator, is newly proposed. As an application of these actuators, a precision stage has been developed. Effectiveness of the stage to the micro manipulation system operated for the microscope has been confirmed.