Denki Kagaku oyobi Kogyo Butsuri Kagaku
Online ISSN : 2434-2556
Print ISSN : 0366-9297
Technical Paper
Very Low Temperature Chemical Vapor Deposition of Silicon Dioxide Films using Ozone and Organosilane
Kazuo MAEDA, Junji SATO
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1977 Volume 45 Issue 10 Pages 654-659

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© 1977 The Electrochemical Society of Japan
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