Denki Kagaku oyobi Kogyo Butsuri Kagaku
Online ISSN : 2434-2556
Print ISSN : 0366-9297
Technical Paper
Influence of Trichloroethylene on the Suppression of Oxidation-Induced Stacking Faults in Silicon Wafers
Takeshi HATTORI
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1978 Volume 46 Issue 2 Pages 122-127

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© 1978 The Electrochemical Society of Japan
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