Fabrication of Micro-Gratings on Inorganic Materials by Two-Beam Holographic Method Using Infrared Femtosecond Laser Pulses

Abstract

This paper describes the nanomachining of inorganic materials by two-beam holographic method using high peak power infrared femtosecond laser pulses. Micro-grating structures can be holographically encoded in any type of materials by colliding a pair of pulses split from a single femtosecond laser pulse. We also describe the periodic nano-structure array in crossed holographic gratings on silica glass by two femtosecond laser pulses. A variety of periodic nano-structures from a one-dimensional wire array to two-dimensional arrays of hole or island were formed by changing the energy density and the incident angle of the irradiation laser beams.