Laser-Based Microsensors

Abstract

Integrated optical microsensors based on photolithography were developed in the early 1990s. Since then, sensors that make the most of the intrinsic properties of laser diodes have been developed. A marriage of micromachining and opto-electronics is expected to create tremendous new opportunities for applications. This article introduces various laser-based microsensors that can be incorporated into a small actuator fabricated by micromachining technologies, and laser-based sensors using microstructural elements (microbeans, microspheres, and microtips).