Optical Switch and Optical Attenuator based on Planar Lightwave Circuits and MEMS Technologies

Abstract

We propose multichannel optical components based on Planar Lightwave Circuits and MEMS technologies for application to Optical Add Drop Multiplexers in Wavelength Division Multiplexed transmission systems. A 12 channel optical switch array and variable optical attenuator array have been successfully developed by integrating 2×2 cross type waveguides and MEMS micro-mirrors connected together by flip chip bonding. In this report, We will show the schematics and mechanism of the system, design and fabrication techniques, some typical optical characteristics, and some reliability tests results.