The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Enhancement of Conversion Efficiency of Extreme Ultraviolet (EUV) Emission from a Laser-Produced Plasma by Use of Water Jet Target
Takeshi HIGASHIGUCHI, Chirag RAJYAGURU, Masato KOGA, Wataru SASAKI, Shoichi KUBODERA
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Keywords: Extreme ultraviolet (EUV) emission, Laser-produced plasma (LPP), EUV lithography
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2005 Volume 33 Issue 2 Pages 126-129

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Abstract
Extreme ultraviolet (EUV) radiation at the wavelength of around 13 nm was observed from a laser-produced plasma using continuous liquid water-jet. The EUV conversion efficiency (CE) was found to depend strongly on the laser focal spot size near the plasma expansion diameter. The maximum EUV CE was observed to be 0.38%/2π sr at 13.0nm in 2% bandwidth.
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© by The Laser Society of Japan
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