Abstract
Combined Laser Ablation Fluid RAdiation simulation Code (LAFRAC) is developed for estimation of debris generation from Laser-produced tin EUV light sources. Debris consists mainly of neutral particles, which cannot be controlled by electric and/or magnetic forces. Therefore, estimations on generation of neutral par ticles and mitigation of them is very important. In LAFRAC, phase transitions from solid to liquid and liquid to gas are modeled by improved Anisimov formula. The formation of clusters in the ablated plume (phase transition from gas to liquid) is evaluated by a new model based on Luk'yanchuck-Zeldovich-Raizer model. The new model is written for plane symmetry with arbitaly profiles. Theoretical estimations on debris generations and comparison between CO2 and Nd: YAG laser cases are performed. In the case of using CO2 laser and tin targets, debris generation is reduced compared with the case of using Nd: YAG laser.
