High Pulse-Energy Green Laser for Laser Annealing System by LD-pumped Nd:YAG Laser

Jun IZAWA; Fumio MATSUZAKA; Kenichirou NISHIDA; Ryuusuke KAWAKAMI; Norihito KAWAGUCHI; Miyuki MASAKI; Masaru MORITA; Atsushi YOSHINOUCHI; Kiyoyuki ODAGIRI; Yoshinori KAWASAKI

doi:10.2184/lsj.36.1089

Lasers and Laser Systems

High Pulse-Energy Green Laser for Laser Annealing System by LD-pumped Nd:YAG Laser

Jun IZAWA, Fumio MATSUZAKA, Kenichirou NISHIDA, Ryuusuke KAWAKAMI, Norihito KAWAGUCHI, Miyuki MASAKI, Masaru MORITA, Atsushi YOSHINOUCHI, Kiyoyuki ODAGIRI, Yoshinori KAWASAKI

Author information

Jun IZAWA
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Fumio MATSUZAKA
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Kenichirou NISHIDA
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Ryuusuke KAWAKAMI
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Norihito KAWAGUCHI
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Miyuki MASAKI
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Masaru MORITA
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Atsushi YOSHINOUCHI
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Kiyoyuki ODAGIRI
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801
Yoshinori KAWASAKI
Quantum Applied Engineering Department, IHI Corporation Yokohama Engineering Center, 1, Shinnakahara-cho, Isogo-ku, Yokohama 235-5801

Keywords: Intra-cavity, Annealing, SHG, LD-pumped, LD-pumped, Nd:YAG

JOURNAL FREE ACCESS

2008 Volume 36 Issue APLS Pages 1089-1091

DOI https://doi.org/10.2184/lsj.36.1089

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Abstract

Recently, we have demonstrated high average-power SHG generation by LD-pumped kHz-class pulsed Nd:YAG laser. Using this technique, we have developed a green laser for the YAG Laser Annealing System. We have obtained a green output with high average power (160W) and high pulse-energy (80mJ/pulse). By using an intra-cavity oscillator, a stability of laser beam and efficiency from pumping-LD to the green output are improved on a few times from our recent system with extra-cavity SHG method.

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