Modeling of the Atomic Processes and Photo Emission of the Plasmas for the EUV Source

Abstract

A study of the coefficient of radiative transfer of Sn plasmas for the extreme ultra-violet (EUV) light source is presented. The atomic data of near 10 times ionized Sn ions are calculated using the Hullac code, and the emissivity and opacity are calculated using a collisional radiative model, which is used in the radiation hydrodynamics code to calculate the emission spectrum and conversion efficicency. The accuracy of the coefficients of radiative transfer are improved by considering the detailed spectral structure of strong 4d-4f resonance lines, as well as including a large number satellite lines, along with correction of transition wavelength after comparison with spectroscopic measurement.