Surface Nano-fabrication by Laser Precision Engineering

Abstract

Research progress on laser nano-fabrication with the combination of AFM, NSOM and transparent particles mask is reviewed. With the combination of other advanced processing tools, laser irradiation can push the processing feature size down to ~ 20 nm. However, laser nano-fabrication with single optics brings about the technical challenge of slow processing speed. Parallel laser nano-patterning was recently developed to achieve large area and high speed nano-fabrication with laser irradiation through a micro-lens array. Laser interference lithography is also studied to fabricate 100 nm functional periodic nanostructures on substrate surfaces.