The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Processing
Surface Micro-Structuring of Silica Glass by Laser-induced Backside Wet Etching
Hiroyuki NIINOYoshizo KAWAGUCHITadatake SATOAiko NARAZAKIRyozo KUROSAKI
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2008 Volume 36 Issue APLS Pages 1246-1249

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Abstract
We have investigated a one-step method to fabricate a microstructure on a silica glass plate by using laser-induced backside wet etching (LIBWE) that consists of excimer laser mask projection system and diode-pumped solid state (DPSS) laser beam scanning system. Well-defined deep microtrenches without crack formations on a fused silica glass plate were fabricated by LIBWE method with the UV lasers. We have demonstrated the micro- fabrication of pits-array and patterned grating on the surface of silica glass plates by LIBWE method at 248 nm and 266 nm with dye solutions. The two new systems allow us to use rapid prototyping of high precision surface microfabrication of silica glass as laser direct-write processing.
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© Laser Society of Japan
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