The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Original
Small Vibration Sensor Using Self-Coupling Effect of Semiconductor Laser
Yasuhiko NAWA, Norio TSUDA, Jun YAMADA
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Keywords: vibration sensors with the laser interferometer have been developed. However, there are some
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2009 Volume 37 Issue 8 Pages 619-623

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Abstract
In developing automation in processes, a demand for compact and sensitive sensors is increasing. Small
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© 2009 by The Laser Society of Japan
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