The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Laser Photochemical Processing
Koichi TOYODA
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Keywords: of excimer laser was applied for the surface fabrications of microstructure. The exposure of excimer
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2010 Volume 38 Issue 1 Pages 39-42

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Abstract
Application of photochemical processing is described. The short wavelength and high intensity exposure
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© 2010 by The Laser Society of Japan
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