The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Micromachining Using XUV～X-Ray
Tetsuya MAKIMURA, Hiroyuki NIINO, Shuichi TORII, Kouichi MURAKAMI
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Keywords: targets with pulsed Nd:YAG laser light. The XUV light was focused with an ellipsoidal mirror to
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2010 Volume 38 Issue 12 Pages 957-962

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Abstract

We investigated micromachining using laser plasma XUV light that was generated by irradiating

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© 2010 by The Laser Society of Japan
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