The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Original
Ablation Mechanism of Silica Glass Induced by Laser Plasma Soft X-Rays
Shuichi TORII, Tetsuya MAKIMURA, Hiroyuki NIINO, Kouichi MURAKAMI
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Keywords: demonstrated nano- and micromachining of silica glass using soft X-rays. To clarify the ablation
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2010 Volume 38 Issue 12 Pages 987-991

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Abstract

We have investigated ablation of silica glass induced by laser plasma soft X-ray irradiation and

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© 2010 by The Laser Society of Japan
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