The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Sub-Nanometer Length Measurement System Using a fs-comb
Mariko KAJIMA, Kaoru MINOSHIMA
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Keywords: zooming interferometer, which could improve the resolution and accuracy of a laser interferometer. Two
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2011 Volume 39 Issue 11 Pages 842-846

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Abstract
A length measurement system with sub-nanometer accuracy was developed. The system used the optical
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© 2011 by The Laser Society of Japan
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