The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Laser Annealing Technique for Next-generation Flat Panel Displays
Jun GOTOH
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Keywords: uniform LTPS (Low Temperature Polycrystalline Silicon) substrate is desired by large area OLED panel
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2011 Volume 39 Issue 9 Pages 690-693

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Abstract
Next-generation Flat Panel Displays (FPDs) require new laser annealing technique. Low cost, large and
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© 2011 by The Laser Society of Japan
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