Abstract
We reviewed a one-step method to fabricate a microstructure on a silica glass plate using laser-induced
backside wet etching (LIBWE), which is one media-assisted laser processing method based on liquid
laser ablation with a conventional pulsed laser at UV or visible wavelength. Well-defined deep
microtrenches without cracks and chipping formations on the glass plate were fabricated by LIBWE.
The system allows us to use rapid prototyping of high precision surface microfabrication of the glass and
other transparent materials as laser direct-write processing in conventional atmospheric environments.
