The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Industrial Application of Ultrashort Laser Processing
Wataru WATANABEMichiharu OTAKazuyoshi ITOH
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2013 Volume 41 Issue 10 Pages 780-

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Abstract
Due to their extremely high peak intensity, ultrashort laser pulses can readily initiate the multi-photon process at the focal point inside transparent materials and directly and precisely join them via localized melting without any intermediate layer under a room-temperature environment. These features are well fi tted for the hermetic sealing of such photonics devices as solar cells, LCDs, and MEMS. We review the recent advances of the welding or joining of glass substrates with an ultrashort laser micro (ULM) joining technique. After briefl y discussing its principles, we address such critical issues of it as the pulse repetition rate, the use of the fi lamentary propagation of pulses, residual stress, glass-metal joining, the joined glass-metal interface, and the temperature dynamics. Finally, we introduce trial applications to industrial solar cell panels and the glass-Si wafer joining.
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© 2020 by The Laser Society of Japan
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