Abstract
We fabricated MgO:LiNbO3 (MgO:LN) thin fi lm waveguides by surface-activated bonding with metal
layers and ion slicing with He+ ion implantation. He+ ions of 300 keV were implanted into MgO:LN
crystals at a dose of 4.0 × 1016 ions/cm2 to slice thin fi lms by thermal treatment. We obtained 1-μmthick
MgO:LN thin films on SiO2/Au/MgO:LN substrates. Laser light was end-fire coupled to the
waveguide. The FWHM sizes in depth of the mode profi les were approximately 1.2 and 1.4 μm for 0.78
and 1.55 μm wavelengths, respectively. We obtained strongly confi ned guided modes.
