Pulsed Laser System with Variable Pulse Duration for Laser Annealing

Abstract

We have developed a unique Nd:YAG laser source for laser annealing, which can oscillate with variable pulse duration. The pulse duration is electrically varied by three Pockels cells arranged in series. These Pockels cells are synchronized with each other. With this setup, we have achieved a variable pulse duration of 80-1300 ns by controlling the trigger timings and the applied voltages for each of the Pockels cells. In this report, the configuration of the laser source and the Q-switch control sequence are described. Moreover, qualitative annealing results obtained with the system are shown.