Abstract
We established a method to calibrate the responsivity of a terahertz (THz) detector using a standard
blackbody furnace and terahertz filters including metal-mesh low-pass filters, a z-cut crystal quartz plate,
and black polyethylene sheets. The basis of our method is to determine the incident energy to a detector
by Planck’s radiation law, the transmittance of THz filters and SΩ, and the product of the area and the
field of view (FOV) in an optical system of measurement. We confirmed the reliability to calibrate the
responsivity without any effects by changing the blackbody temperature from 600 to 1000 K. In this
study, we calibrated the sensitivity and the NEP of four THz pyroelectric detectors operated at room
temperature in three frequency-band conditions (3 THz low-pass, 2 THz low-pass, and 1.5 THz bandpass)
and obtained the reliable sensitivity and the NEP of the THz detectors to compare them.
