Silicon Photonics Based on CMOS-Compatible Process

Abstract

Si photonics technologies enable dense integration of such photonic devices as passive devices, p/n modulators, and Ge photo-diodes. The CMOS-compatible foundry services of Si photonics achieve wafer-scale production of photonic integrated circuits with sophisticated functions as well as low cost by a multi-project-wafer process. Recently, they also include the fabrication of complicated photonic crystals and related nanostructures in their recipes. Thus, the research and development of photonic devices and integrated circuits are changing rapidly and becoming more design- and system-oriented. This paper reports such new trends and some example demonstrations.