Abstract
We measured the gas temperature on a surface discharge ozonizer by a Michelson interferometer using a
He-Ne laser. The ozonizer has a configuration of a thin dielectric material plate (Al2O3) that is put
between a stripe-shaped high voltage electrode and a grounded electrode. In these experiments, oxygen
gas with a flow rate of 1.5 l/min was used for ozone generation, and ozone concentrations of 28 and
33 g/m3 were obtained at discharge powers of 31 and 57 W. The gas temperature was about 50 ℃, 70 ℃
at 2.5 mm from the surface of the ozonizer elements. The estimated temperature agreed qualitatively
with the results of thermal conduction analysis.
