2015 Volume 43 Issue 11 Pages 735-
Recently two-photon microfabrication techniques have attracted much attention due to their ability to produce complex three-dimensional micro/nanostructures and a wide variety of materials. In this paper, we briefly review the recent progress of two-photon microfabrication and introduced nanofabrication techniques using both femtosecond and deactivation laser beams. Such post processes as electroless plating and thermal treatment are also demonstrated to produce functional micro/nano devices. Finally promising applications including photonics, lab-on-a-chip, and MEMS are introduced.
