Abstract
Holographic laser processing using a spatial light modulator (SLM) enhances the efficiency and accuracy
of such laser processing as precise periodic structuring, welding, optical storage, and dicing. In this
paper, we experimentally confirmed the stability of SLM in a laser processing setup using a high-power
femtosecond laser. A temperature-controlled SLM indicated enough stability for a regenerative
amplified femtosecond laser with 5.7 W power. In addition, we applied SLM to large-scale parallel laser
processing with a high-power femtosecond laser. On a glass sample, we successfully performed 1005
parallel laser processing by an optimized computer-generated hologram (CGH). In large-scale parallel
laser processing, the required pulse energy was sufficiently smaller than the SLM’s damage threshold.
