The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Athermal and Tunable Operation of VCSELs with Micromachined Structure
Masanori NAKAHAMA, Takahiro SAKAGUCHI, Akihiro MATSUTANI, Fumio KOYAMA
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Keywords: Vertical cavity surface emitting lasers, Micro-electro-mechanical-system, Tunable semiconductor lasers
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2015 Volume 43 Issue 7 Pages 458-

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Abstract
We report an analytic model based on one-dimensional cantilever structure for designing the athermal and tunable MEMS VCSEL. The theoretical results calculated by using the model show good agreement with experimental results. We also discuss the theoretical limit of the wavelength tuning range with athermal operation. It is revealed that the limiting factor of the tuning range is the free-spectral-range of the cavity, which can be expanded by making the cavity length shorter.
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© 2015 by The Laser Society of Japan
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