Abstract
In this paper, we describe the development of a system to generate quasi-continuous wave coherent light
at vacuum ultraviolet wavelengths, targeting the light at wavelength of 160 nm with a KBBF crystal. It
consists of sequential wavelength conversion stages containing second harmonic generation (SHG) and
sum-frequency generation. In the first SHG stage, light at 400 nm with a power of more than 900 mW
and a stability of more than 1 hour was obtained by exploiting an enhanced cavity. And, light at 200 nm
with a power of 5.7 mW and a stability of more than 3 hour was also observed, in the second stage, by
single pass SHG with a KBBF-PCD. We aim to generate 160-nm light with a power level of μW in the
final stage.
