Abstract
Stereoscopic structure is essential to realize three-dimensional functional metamaterials. Several
fabrication techniques for such a stereoscopic metamaterial structure are reviewed, and as a novel and
promising technique for the large area 3D metamaterials, metal-stress driven self-folding method, which
uses electron beam lithography and self-organized formation of resonator rings using residual stress of
metal thin films, is introduced. As an example of 3D functions of metamterial, isotropic effective index
of 0.35 was experimentally demonstrated at 30 THz.
