Abstract
We fabricated 1 μm high and 1.5 μm diameter microswellings on a silicone rubber surface at regular 2.5
μm intervals by a 193 nm ArF excimer laser. The laser was focused on silicone rubber by each
microsphere made of 2.5 μm diameter silica glass, which covered the entire surface of the silicone
rubber. The surface underneath each microsphere was selectively swelled due to the photodissociation
of the Si-O bonds of the silicone. The water’s contact angle was measured to be approximately 155
degrees, indicating a clear superhydrophobic property. The samples successfully repelled water in water
to form an air gap layer between the silicone rubber and the water.
