Surface Microstructuring of Glass Materials by Laser-Induced Backside Wet Etching

Abstract

We review a one-step method to fabricate microstructure on a glass plate using laser-induced backside wet etching (LIBWE). The LIBWE method is based on liquid laser ablation with a conventional pulsed laser at UV or visible wavelength. We fabricated a well-defined deep microarray without cracks or chipping formations on the glass plate by the LIBWE method. The system allows us to use the rapid prototyping of the high precision surface microfabrication of glass and other transparent materials as laser direct-write processing in a conventional atmospheric environment.