The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Original
Light Enhancement under the Opening of Metal Gratings on Semiconductor Substrate
Ryo KIKKAWAKeisuke GODADaiki UEYAMAMunehiro NISHIDAYutaka KADOYA
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2019 Volume 47 Issue 7 Pages 375-

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Abstract
We theoretically investigated the enhancement of light intensity in a semiconductor near the surface by metal gratings with a coupled-mode method, focusing on the enhancement under the metal opening (slit). Although the enhancement peaks at the Fabry-Perot resonance wavelengths, dark lines appear in it under the slit at wavelengths slightly longer than the diffraction’s onset called the Rayleigh wavelength. By inspecting the reflection coefficient at the slit’s exit interface, we clarified that the disappearance of the enhancement is caused by the boundary conditions at the interface and is a general feature of metal gratings.
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© 2019 by The Laser Society of Japan
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