Abstract
An In-Au alloy sealing was found to satisfy all the requirements imposed on the developing a sealed-off CO2 laser which has long life and high reliability. The sealing between different materials such as quartz, SUS303, Si and Zn Se was shown to withstand the thermal shock test, and gave the He leak rate lower than 1×10-9 atm-cc/sec both before and after the tests. The value of it could guarantee the shelf life of the laser tube for longer than 10 years. It was also proved that the transmittance characteristics of dielectric coated output couplers did not change after the sealing process. The sealed-off CO2 lasers with La1-xSrxCo O3 perovskite oxide cathodes sealed with this method turned out the operational life of 3000 hours at the power level of 50 W/m.
