Abstract
The present status of short pulse excimer lasers is described with an enphasis on XeCl, KrF and ArF. Main contents are (1) the gain spectra of excimer lasers, (2) short pulse generation and pulusewidth measurementat the excimer wavelengths, (3) scaling of peak power with regard to absorption, amplified spontaneous emission, and dispersion of optical elements. Typical short pulse excimer laser systems are summalized. Finally the prospect of applications such as multiphoton process are presented.
