Vistas of Laser-Phtochemical Processing

Role of Excimer Lasers

Abstract

Rapid growth of laser photochemical processings including lithography, and CVD as well as other new surface modification techniques have suggested the realization of new material techniques using short wavelength lasers.
The excimer lasers will have a central role in this development. The short wavelengths of excimer lasers contribute to satisfy the requirement of local attachment of specific materials or removal in a single step process which increases the importance in future. The short pulse durations of excimer lasers make it possible to create new non-equilibrium materials having new compositions and new microsturctures which are not obtained normally.