Studies on High Repetition rate and Long Life Electron Beam Pumped KrF Excimer Laser

Abstract

Techniques necessary for obtaining a high repetitive and long life operation of an electron beam pumped excimer laser were developed and studied. Using these techniques, the test facilities of the electron beam pumped KrF excimer laser with high repetitive operation was constructed. The laser output energy, repetition rate, and total efficiency are 6J, 4pps, and about 1.3%, respectively.