Abstract
Discharge excited high repetition-rate excimer lasers will be useful to the material process of a next generation. In this paper, the technologies for the discharge excited high repetition-rate excimer lasers including gas circulation system, magnetic pulse compressor, pre-ionizer and gas recycling system, are discussed. We wish to report a high power KrF excimer laser with a new capacitor-transfer-type configuration, which delivered an average power of 150W at a high efficiency of-3.8% and a high repetition-rate of 700Hz.
