Abstract
Five compact supeconducting light sources for synchrotron radiation (SR) are under development in the world. Some of them have already been utilized for lithography. Superconducting SR-source are not only small, but also have profitable features, high briliance and easier operation compared to a normal conducting SR source for a UV, VUV, and soft X-ray. This paper reports the present status of the superconducting SR soureces. Particularly, some detailes of AURORA which is made of a single superconducting magnet are presentd. Also mentioned is that the compact SR-source is useful to generate coherent millimeter or submillimeter waves.
