Trends of Solid State Imaging Device

Abstract

Scince 1981, the characteristics of solid state imaging devices such as charge coupled devices (CCD) have been improved and their sales have been increasing, due mainly to the popularization of home-use video cameras. Chip size has been down-sized from 2/3 inch lenz format to 1/3 inch. Sensitivity has been growing 100 times in the post 10 years. High definition format CCDs with 2 mega pixels were also proposed, leading to a small cell size of around 7μm×7μm. In this paper, the virtual phase CCD, which was developed for X-ray sensing, is also described.