The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Reflection Micro-Fresnel Lenses Fabricated by Electron-Beam Lithography
Teruhiro SHIONOKentaro SETSUNEKiyotaka WASA
Author information
JOURNAL FREE ACCESS

1990 Volume 18 Issue 9 Pages 741-754

Details
Abstract
Reflection micro-Fresnel lenses and their application to an integrated optical-disk pick-up are proposed. Theoretical analysis indicates that the optical characteristics of reflection micro-Fresnel lenses can be improved compared with a conventional transmission micro-Fresnel lens. These reflection micro-Fresnel lenses were fabricated using electron-beam lithography and exhibited diffraction-limited focusing characteristics with 71% high efficiency. The pick-up has a folded optical path and includes a beam splitter integrated with thin film components, such as a reflection elliptical micro-Fresnel lens and a quadrant photodetector. The reflection elliptical micro-Fresnel lens in the pick-up exhibited excellent astigmatic characteristics in good agreement with theoretical results, and a focus error signal was also detected.
Content from these authors
© The Laser Society of Japan
Previous article Next article
feedback
Top