Abstract
Theories of light scattering from lattice detects of crystals induced by an incident laser beam from an electromagnetic wave point of view and the detection method and instrument of light scattering are reviewed. Microdefects and microprecipitates in crystals were non-destructively detected and characterizied in the bulk and near surface of crytals by laser light scattering tomography. The three dimensional distribution of defects in crystals can be obtained by layer-by-layer tomographic observation. Some results of observation will be done here about the microdefects in semiconductive crystals by a method using a YAG laser beam.
