Abstract
High-average-power in the UV region has become more important for photochemical processing and microelectnics. UV light has generated by the fourth harmonic conversion from Nd: YAG lasers. We achieved an average power of 10-W at 532 nm by an intracavity LBO doubling in a CW-pumped acoustoptic Q-switched Nd: YAG laser at a repetition rate of 5 kHz. With this 532 nm output power, an average power of 2-W at 266 nm was generated by an extracavity conversion with BBO. This UV source can be used for removal processing of polymer films.
