Laser Spectroscopic Diagnostics of Pulsed-Laser Deposition Process

Abstract

Laser spectroscopic technique has been widely applied to dignose in-situ behavior of particles and physical quantities in a variety of industrial fields such as material processing, fluid engineering, combustion and so on.This paper reviews the application of laser spectroscopic diagnostics into a pulsed-laser deposition of high temperature superconducting thin films, which has been recognized as a new and potential method for high quality thin film fabrication.