Applications of Excimer Lasers

Abstract

Excimer lasers and its applications of wide scope are reviewed. Emphasis is placed on the industrial applications from the point of practical uses.
Processsing equipments using excimer lasers and various material processsings such as drilling, cutting and marking based on the ablation principle, optical lithography, annealing, surface modification, thin film preparation, medical applications, and applications using F₂ laser are described. Recent results of the Japanese national AMMTRA project are also reviewed.