Abstract
Experimental studies are described of the problem of scattering and roughness modification after deposition of optical thin films as used for application in laser components. BK7 substrates with different surface finish have been coated with MgF2, LaF3, Si02 and Nb2O5 films as representatives of low index/ high index columnar structured and structureless films, respectively. Total integrated scattering (TIS) and angle resolved scattering (ARS) measurements at 632.8 nm and 325 nm as well as atomic force microscopy (AFM) investigations demonstrate that coating can result not only in roughness and scattering enhancement but also in its reduction.
