Abstract
Combination of laser machining and conventional mechanical lathe machining provides a new technique for machining of three dimensional microstructure. We have developed such a technique, in which rotating works are irradiated with focused laser pulses. The laser operation is controlled with a personal computer, to which the data of final machined shapes and programs for the machining process are installed. It is demonstrated that the machining of an arbitrary three-dimensional micro structure having a typical dimenssion of less than 1 mm is possible by using this new technique.
